【発明の名称】ダイヤモンド単結晶薄膜の気相合成方法

Title:

【発明の名称】ダイヤモンド単結晶薄膜の気相合成方法

Document Type and Number:

Japanese Patent JP2895179

Kind Code:

B2

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Inventors:

SHIBATA NORYOSHI
ISHIKAWA YUKARI
MATSUDA TAKASHI

Application Number:

JP20709090A

Publication Date:

May 24, 1999

Filing Date:

August 04, 1990

Export Citation:

Assignee:

FUAIN SERAMITSUKUSU SENTAA

International Classes:

C30B29/04; (IPC1-7): C30B29/04

Domestic Patent References:

JP63286576A
JP61106494A

Attorney, Agent or Firm:

Hidehiko Okada (3 others)

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