Title:
【発明の名称】非接触面粗さ評価方法および非接触面粗さ評価装置
Document Type and Number:
Japanese Patent JP3010213
Kind Code:
B1
Inventors:
Tetsuya Kawanishi
Application Number:
JP26745198A
Publication Date:
February 21, 2000
Filing Date:
September 04, 1998
Export Citation:
Assignee:
Director, Communications Research Laboratory, Ministry of Posts and Telecommunications
International Classes:
G01B11/30; G01B15/00; G01B15/08; G01B21/30; G01N21/21; G01N21/88; G01N21/93; G01N21/94; G01N37/00; (IPC1-7): G01B11/30; G01B15/00; G01B21/30; G01N21/88
Domestic Patent References:
| JP55156841A |