Title:
【発明の名称】対象物検査装置および方法
Document Type and Number:
Japanese Patent JP2003506801
Kind Code:
A
Abstract:
This invention discloses a system and method for inspecting objects, the method includes creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection comprising a second representation of boundaries within the image, and comparing the second representation of boundaries to said at least partially vectorized first representation of boundaries, thereby to identify defects. A method and system for image processing in a software environment, the method including providing to a software based image processor a combination of user defined regions and defect triggers received from a hardware processor, and inspecting each of the user defined regions and regions surrounding hardware defect triggers each with a dynamically chosen set of inspection algorithms is also disclosed.
Inventors:
Duv Devani Sharon
Girat-Barnstein Tarry
Klingbell Eyal
Mayo Mail
Ripper Shmuel
Smilanski Zev
Girat-Barnstein Tarry
Klingbell Eyal
Mayo Mail
Ripper Shmuel
Smilanski Zev
Application Number:
JP2001516141A
Publication Date:
February 18, 2003
Filing Date:
August 03, 2000
Export Citation:
Assignee:
Orbotech Limited
International Classes:
G01N21/956; G06T1/00; G06T7/00; G01B11/30; (IPC1-7): G06T1/00; G01B11/30; G01N21/956; G06T7/00
Attorney, Agent or Firm:
Shuhei Matsuoka