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Patent Searching and Data


Title:
SEMICONDUCTOR COMPONENT MANUFACTURING EQUIPMENT
Document Type and Number:
Japanese Patent JPH0774187
Kind Code:
A
Abstract:

PURPOSE: To make no space between works before a manufacturing work and to make automatically a space between the works after finishing the manufacturing work in carrying the rectangular works.

CONSTITUTION: A reversing mechanism 10 is installed at a place on an actuating shaft 2 nearer the carried-out side C than a bonding point of a carrier path A. A second feed pawl 23 is installed at a driven section 21a which belongs to the reversing mechanism 10 and to which the reversing operation of the actuating shaft 2 is transmitted. When the actuating shaft 2 works, the second feed pawl 23, with the feeding operation at a different cycle from that of the other feed pawl 1, moves a work by a constant distance towards the carried-out side C. By this method, a space corresponding to one pitch is automatically formed between a preceeding work and a following work.


Inventors:
NAKATOMI YOSHIHARU
SEKI YUTAKA
Application Number:
JP23894993A
Publication Date:
March 17, 1995
Filing Date:
August 31, 1993
Export Citation:
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Assignee:
TOSOK CORP
International Classes:
H01L21/50; H01L21/677; H01L21/68; (IPC1-7): H01L21/50; H01L21/68
Attorney, Agent or Firm:
Chiaki Miyoshi