Title:
【発明の名称】位置検出装置及び位置検出方法
Document Type and Number:
Japanese Patent JP2650396
Kind Code:
B2
Abstract:
A position detecting method and device for detecting the position of an object to be examined, through image pickup of a mark formed on the object, is disclosed. The method includes an image forming step for illuminating the mark with a radiation beam in a first direction and a second direction different from the first direction, and for forming a first image of the mark with the illumination in the first direction and forming a second image of the mark with the illumination in the second direction; a determining step for selecting one of the first and second images; and a detecting step for detecting the position of the object on the basis of the selected image or an image of the mark formed with the illumination in the direction corresponding to the selected image. The device is adapted to execute the position detection in this manner.
Inventors:
MURAKI MASATO
Application Number:
JP2814489A
Publication Date:
September 03, 1997
Filing Date:
February 07, 1989
Export Citation:
Assignee:
KYANON KK
International Classes:
G01B11/00; G03F9/00; H01L21/027; H01L21/30; (IPC1-7): G01B11/00; G03F9/00; H01L21/027
Domestic Patent References:
| JP63274144A | ||||
| JP6135519A | ||||
| JP62213124A | ||||
| JP1198019A | ||||
| JP2126628A | ||||
| JP2188907A | ||||
| JP6375603A | ||||
| JP62224026A | ||||
| JP6432624A | ||||
| JP5212580B1 | ||||
| JP619733B2 | ||||
| JP616480B2 |
Attorney, Agent or Firm:
Takanashi Yukio