Title:
【発明の名称】誤差補償を有する圧力変換器
Document Type and Number:
Japanese Patent JP2001511884
Kind Code:
A
Abstract:
A pressure transducer that includes at least two sensors having substantially similar or substantially identical error characteristics, wherein each sensor is arranged to be subjected to an applied pressure and the outputs of the sensors are electrically coupled so that errors associated with one sensor are compensated by errors associated with the other sensor. The sensors may be substantially identical silicon sensors formed in close proximity on the same wafer.
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Inventors:
Dauenhauer Dennis
Dauenhauer Day
Breitenbach Alexander
Erissen Harman
Dauenhauer Day
Breitenbach Alexander
Erissen Harman
Application Number:
JP50533798A
Publication Date:
August 14, 2001
Filing Date:
July 10, 1997
Export Citation:
Assignee:
Honeywell Data Instruments Incorporated
International Classes:
G01L19/06; G01L9/00; G01L9/06; G01L13/02; G01L13/06; G01L19/04; G01L19/14; (IPC1-7): G01L19/06; G01L13/06
Attorney, Agent or Firm:
Masaki Yamakawa (5 outside)