Title:
【発明の名称】走査電子顕微鏡
Document Type and Number:
Japanese Patent JP3341226
Kind Code:
B2
Abstract:
The device of the present invention enables high resolution observation even when a sample is tilted. A deflecting electrode device 17 for generating an electric field having a component in the direction perpendicular to the center axis (optical axis) of an objective lens 6 is provided between the objective lens 6 and the sample 8. A voltage applied to the deflecting electrode device 17 is controlled in accordance with the tilting of a sample stage 10. A lateral electric field component generated on the optical axis when the sample stage 10 is tilted is corrected by a deflected electric field generated by the deflecting electrode device 17. This is effective to suppress generation of astigmatism, and to allow effective arrival of a secondary electron at a secondary electron detector disposed at a position closer to the electron source 1 than the objective lens 6.
Inventors:
Yuko Iwabuchi
Mitsugu Sato
Youichi Kose
Mitsugu Sato
Youichi Kose
Application Number:
JP5937695A
Publication Date:
November 05, 2002
Filing Date:
March 17, 1995
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/20; H01J37/12; H01J37/153; H01J37/244; H01J37/28; (IPC1-7): H01J37/153; H01J37/20; H01J37/244; H01J37/28
Domestic Patent References:
| JP436945A | ||||
| JP4943562A | ||||
| JP2250252A |
Attorney, Agent or Firm:
Yukihiko Takada