Title:
【発明の名称】走査幅検出装置および走査型顕微鏡の倍率表示装置
Document Type and Number:
Japanese Patent JP2660612
Kind Code:
B2
Inventors:
HAKAMATA KAZUO
Application Number:
JP17515691A
Publication Date:
October 08, 1997
Filing Date:
July 16, 1991
Export Citation:
Assignee:
FUJI SHASHIN FUIRUMU KK
International Classes:
G02B21/00; G01Q10/04; G01Q30/04; G01Q90/00; G02B26/10; H01J37/22; H01J37/28; (IPC1-7): G02B21/00; G02B26/10; H01J37/22; H01J37/28
Domestic Patent References:
| JP3197869A | ||||
| JP52135A | ||||
| JP4309914A | ||||
| JP4338911A | ||||
| JP476512A | ||||
| JP6157921A | ||||
| JP1156713A | ||||
| JP797185B2 | ||||
| JP797186B2 |
Attorney, Agent or Firm:
Seiji Yanagida (1 person outside)