Title:
HIGHLY EFFICIENT CATHOD LUMINESCENCE DETECTOR EXCELLENT IN BACK SCATTERING ELECTRON IDENTIFICATION
Document Type and Number:
Japanese Patent JPH0729537
Kind Code:
A
Abstract:
PURPOSE: To provide a cathode luminescence detector which has relatively high efficiency and which is excellent in identification of a signal based on a backward scattering electron. CONSTITUTION: A paraboloidal light reflecting device 16 in a cathode luminescence(CL) device is integrated into a photoelectric solid state device 19 mounted on a support plate 21, and is supported by an adapter element 27 in an electron microscope vacuum chamber sample stage. These elements are optically aligned with one another, and therefore, a replaceable unit can be easily obtained. In the design for operating CL emission in an electron microscope, the paraboloidal light reflecting device 16 and the photoelectric solid state detection device 19 are optically aligned, and thereafter, they are mounted on the support plate 21 of the photoelectric solid state device 19. The unit constituted in this way is supported by a sample stage adapter element 27, and functions as a single integrated unit to provide mechanical elements which can be easily inserted into the standard electron microscope vacuum chamber stage and which can be easily removed therefrom.
Inventors:
JIEIKOBU CHIII HON PAN
DANIERU SHIYUU HAN CHIYAN
KIN RIYON PEI
DANIERU SHIYUU HAN CHIYAN
KIN RIYON PEI
Application Number:
JP28843093A
Publication Date:
January 31, 1995
Filing Date:
November 17, 1993
Export Citation:
Assignee:
UNIV SINGAPORE
International Classes:
G01Q30/20; H01J37/20; H01J37/244; (IPC1-7): H01J37/244
Domestic Patent References:
| JPS517072A | 1976-01-21 | |||
| JPS4846265A | 1973-07-02 |
Attorney, Agent or Firm:
Takehiro Chiba (2 outside)