Title:
【発明の名称】基板の加熱処理方法及び加熱処理装置
Document Type and Number:
Japanese Patent JP2889926
Kind Code:
B2
Inventors:
HIRAKAWA OSAMU
FUJIMOTO AKIHIRO
TERAOKA SEIICHI
FUJIMOTO AKIHIRO
TERAOKA SEIICHI
Application Number:
JP27359989A
Publication Date:
May 10, 1999
Filing Date:
October 20, 1989
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
B05D3/02; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; B05D3/02
Domestic Patent References:
| JP63124424A | ||||
| JP6379636U |
Attorney, Agent or Firm:
Saichi Suyama (1 person outside)