Title:
【発明の名称】表面の検査方法および装置
Document Type and Number:
Japanese Patent JP2640935
Kind Code:
B2
Inventors:
BETSUKAA KURISUTOFUAA EICHI
JIREN KEISU TEI
BATORIRU SHINDEI II JUNIA
JIREN KEISU TEI
BATORIRU SHINDEI II JUNIA
Application Number:
JP50010485A
Publication Date:
August 13, 1997
Filing Date:
September 20, 1984
Export Citation:
Assignee:
ESU AARU AI INTERN
International Classes:
G01N23/225; H01J37/252; H01J49/40; H01L21/00; (IPC1-7): H01J37/252; H01J49/40
Domestic Patent References:
| JP5981854A | ||||
| JP58119148A | ||||
| JP60114753A | ||||
| JP5760375U |
Attorney, Agent or Firm:
Kawahara Kazuho