Title:
【発明の名称】平面研磨方法及び装置
Document Type and Number:
Japanese Patent JP2837422
Kind Code:
B2
Inventors:
NAGAO KATSUNORI
Application Number:
JP5166689A
Publication Date:
December 16, 1998
Filing Date:
March 03, 1989
Export Citation:
Assignee:
SUPIIDO FUAMU KK
International Classes:
B24B57/02; B24B37/00; B24B37/04; B24B37/30; B24B37/32; (IPC1-7): B24B37/04
Domestic Patent References:
| JP63144954A | ||||
| JP63251166A | ||||
| JP62124844A | ||||
| JP6478757A |
Attorney, Agent or Firm:
Hiroshi Hayashi (1 person outside)