Title:
【発明の名称】表面位置検出装置及び表面位置検出方法、並びに露光装置、露光方法及び半導体製造方法
Document Type and Number:
Japanese Patent JP3158446
Kind Code:
B2
Abstract:
In an exposure apparatus and method utilizing a projection system, a surface state relating to an exposure area of the projection system is determined by illuminating the exposure area with light, receiving light from the exposure area, designating positions of a plurality of detection points in the exposure area in accordance with a size of the exposure area, and detecting, based on information of received light corresponding to the plurality of detection points, positions related to the plurality of detection points.
Inventors:
Hideo Mizutani
Naoyuki Kobayashi
Nobutaka Magome
Naoyuki Kobayashi
Nobutaka Magome
Application Number:
JP40188090A
Publication Date:
April 23, 2001
Filing Date:
December 13, 1990
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/26; G01B11/00; G01B11/02; G01C3/06; G03F7/20; G03F7/207; G03F9/00; H01L21/027; H01L21/30; (IPC1-7): G01B11/00; G03F9/00; H01L21/027
Domestic Patent References:
| JP2262323A | ||||
| JP62190410A | ||||
| JP2198130A |