Title:
【発明の名称】薄膜トランジスタおよびその製造方法
Document Type and Number:
Japanese Patent JP2879765
Kind Code:
B2
Inventors:
MORI HISATOSHI
MATSUDA KUNIHIRO
MATSUDA KUNIHIRO
Application Number:
JP4474990A
Publication Date:
April 05, 1999
Filing Date:
February 26, 1990
Export Citation:
Assignee:
KASHIO KEISANKI KK
International Classes:
H01L29/78; G02F1/136; G02F1/1368; H01L21/336; H01L29/786; (IPC1-7): H01L29/786; G02F1/136; H01L21/336
Attorney, Agent or Firm:
Hiroshi Arafune