Title:
【発明の名称】SOR露光装置用傾き検出装置
Document Type and Number:
Japanese Patent JP2742462
Kind Code:
B2
Inventors:
Fumiaki Sato
Kazuhiro Ito
Yoshiyuki Tomita
Kazuhiro Ito
Yoshiyuki Tomita
Application Number:
JP1548690A
Publication Date:
April 22, 1998
Filing Date:
January 25, 1990
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
G01B11/26; H01L21/027; (IPC1-7): G01B11/26; H01L21/027
Domestic Patent References:
| JP2234413A | ||||
| JP6055624A |
Attorney, Agent or Firm:
Keishiro Takahashi