PURPOSE: To enhance the reliability and production yield by facilitating the alignment between vias and ensuring the electrical connection between upper and lower vias or between the via part and the inner electrode pattern.

CONSTITUTION: When ceramic green sheets 10 are laminated, vias are made at corresponding positions in adjacent green sheets and metal powder 18 is filled therein. The green sheets are then laminated and sintered thus electrically connecting the layers through the metallic material filled in the via. A combination of large via 12 and small via 14 is made at the corresponding positions in adjacent green sheets. The diameter of large via 12 is preferable set 1.2-2 times as large as that of small via 14.