Title:
【発明の名称】外観検査用投光装置
Document Type and Number:
Japanese Patent JP3095856
Kind Code:
B2
Inventors:
Mitsuo Harada
Ikuzo Nakamura
Youichi Iba
Ikuzo Nakamura
Youichi Iba
Application Number:
JP3192392A
Publication Date:
October 10, 2000
Filing Date:
February 19, 1992
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G01B11/24; G01B11/30; G01N21/84; G01N21/88; G01N21/94; G01N21/956; H01L21/66; (IPC1-7): G01N21/84; G01N21/956; H01L21/66
Domestic Patent References:
| JP57178134A | ||||
| JP6384556U |
Attorney, Agent or Firm:
Takehiko Suzue