Title:
【発明の名称】気相膜成長装置
Document Type and Number:
Japanese Patent JP2745819
Kind Code:
B2
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Inventors:
Harukan Sakaguchi
Application Number:
JP40974890A
Publication Date:
April 28, 1998
Filing Date:
December 10, 1990
Export Citation:
Assignee:
Hitachi Cable Ltd.
International Classes:
C30B25/14; H01L21/205; (IPC1-7): C30B25/14; H01L21/205
Domestic Patent References:
| JP2208927A | ||||
| JP614222A |
Attorney, Agent or Firm:
Takashi Matsumoto