Title:
【発明の名称】直動式エアベアリングのロック機構
Document Type and Number:
Japanese Patent JP3082991
Kind Code:
B2
Abstract:
PURPOSE:To lock an air slider member to a guide rail member quickly and surely by pushing upper and lower surfaces of the guide rail member using the respective tips of piezo elements, and by fixing the air slider member to the guide rail member using this pushing force through the piezo elements. CONSTITUTION:When an X slider 14 has stopped at a stop position of a guide rail 12, piezo elements 42A to 42F are driven by reverse piezoelectricity effect through a driver 45A of a controller 45 and cables 44A-44F, and the respective tips of the piezo elements 42A-42F abut on the upper surface 12a and the lower surface 12b of the guide rail 12. Thus, the X slider 14 can be fixed to the guide rail 12 by the pushing force of the piezo elements 42A-42F. So, the X slider 14 can be fixed to the guide rail 12 only by applying voltage on the piezo elements 42A-42F. Thus, it is possible to lock the X slider 14 quickly and surely.
Inventors:
Kiyotaka Chiba
Application Number:
JP9273292A
Publication Date:
September 04, 2000
Filing Date:
April 13, 1992
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
F16C32/06; F16D63/00; H01L21/82; H01L41/09; H01S3/00; (IPC1-7): F16C32/06; F16D63/00; H01L41/09; H01S3/00
Domestic Patent References:
| JP1203724A |
Attorney, Agent or Firm:
Kenzo Matsuura