Title:
【発明の名称】低表面張力硫酸組成物
Document Type and Number:
Japanese Patent JP2894717
Kind Code:
B2
Abstract:
A surfactant of the general formula: R<1>SO2NR<2>C2H4OA (wherein R<1> represents a fluoroalkyl group, R<2> represents H or a lower alkyl group, and A represents H or SO3H) is added to a cleaning liquid comprising sulfuric acid or sulfuric acid-hydrogen peroxide, used in the semiconductor industry or the like, to lower the surface tension, thus improving the wettability and enhancing the cleaning effect.
Inventors:
HARA HISAO
MORI KYOTO
SHIHOYA TAKAO
MORI KYOTO
SHIHOYA TAKAO
Application Number:
JP6076589A
Publication Date:
May 24, 1999
Filing Date:
March 15, 1989
Export Citation:
Assignee:
NITSUSAN KAGAKU KOGYO KK
KANTO KAGAKU KK
KANTO KAGAKU KK
International Classes:
C09D9/00; C11D1/00; C23F1/16; C23G1/02; C09K13/08; H01L21/304; H01L21/306; (IPC1-7): C23F1/16; C09D9/00; C09K13/08; H01L21/304
Domestic Patent References:
| JP62109985A | ||||
| JP55107782A | ||||
| JP49104840A |
Other References:
高橋 越民，難波 義郎，小池 基生，小林 正雄「界面活性剤ハンドブック」増補５版（昭５１−７−１）工学図書株式会社ｐ．８７
Attorney, Agent or Firm:
Kiyokazu Kazuwa (1 person outside)