PURPOSE: To improve the rate of effectively utilizing evaporation and to decrease a heat quantity by connecting plural units of the unit evaporation recovering devices in series along the incident and exit directions of a laser beam and removing the wall surfaces adjacent to each other of these unit evaporation recovering devices.
CONSTITUTION: Plural units of the unit evaporation recovering devices 2 are connected in series without providing the adjacent unit evaporation recovering devices 2 with the wall surfaces therebetween. The vapor in the incident and exit directions of the laser beam is made nearly completely incident on a photoreaction section to greatly increase the rate of effectively utilizing the vapor, by which energy efficiency is improved. The heat generated by the heater and electron gun of the unit evaporation recovering device 2 contributes to the heat insulating effect of not only the device but the adjacent devices as well.
KANEI HIROYUKI
YONAGO AKINOBU
