【発明の名称】X線露光マスクの製造方法

Title:

【発明の名称】X線露光マスクの製造方法

Document Type and Number:

Japanese Patent JP2797190

Kind Code:

B2

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Inventors:

Kazuaki Kondo
Masao Yamada

Application Number:

JP775089A

Publication Date:

September 17, 1998

Filing Date:

January 18, 1989

Export Citation:

Assignee:

富士通株式会社

International Classes:

G03F1/22; G03F1/68; G03F1/80; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F1/08; G03F1/16

Domestic Patent References:

JP60186840A
JP1192114A

Attorney, Agent or Firm:

Shoji Kashiwaya (1 person outside)

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