Title:
【発明の名称】薄膜スパッタリング装置向移送装置
Document Type and Number:
Japanese Patent JPH11508323
Kind Code:
A
Abstract:
A transport drive system for use in a sputtering apparatus, particularly an in-line sputtering apparatus, is disclosed. The system transports a plurality of planar substrates and includes a plurality of transport beams having a C-shaped cross-section. Each transport beam has a first and second end, a first and second sides, a top surface, and a channel, disposed under the top portion, and forming a portion of the C-shaped cross-section. The transport beam includes a substrate carrier which secures the substrate or pallet at the top portion of the substrate or pallet, and which is mounted in an alignment with an off-center relationship with respect to the center of the transport beam. In addition, the system for transporting includes a plurality of drive beams. Each drive beam includes a plurality of horizontally-oriented guide wheels disposed on a top surface of the drive beam, the drive wheels engaging the channel of the transport beam. Each drive beam also includes a plurality of vertically-oriented wheel assemblies disposed in a plurality of U-shaped cavities in the drive beam. A motor is provided with each of the drive beams to drive the vertically-oriented wheel assemblies. A shield, provided below the drive beam, ensures that contamination does not reach the interior of the sputtering chamber.
Inventors:
Gruber Thomas A
Application Number:
JP53421596A
Publication Date:
July 21, 1999
Filing Date:
May 08, 1996
Export Citation:
Assignee:
Seagate Technology Incorporated
International Classes:
C23C14/34; C23C14/56; G11B5/85; G11B5/851; H01L21/677; (IPC1-7): C23C14/56; C23C14/34; G11B5/85
Attorney, Agent or Firm:
Minoru Nakamura (6 outside)