Title:
【発明の名称】ワークの乾燥装置
Document Type and Number:
Japanese Patent JP2885621
Kind Code:
B2
Inventors:
SHIBANO YOSHIHIDE
Application Number:
JP27400493A
Publication Date:
April 26, 1999
Filing Date:
November 02, 1993
Export Citation:
Assignee:
ESU ANDO SHII KK
International Classes:
F26B15/14; F26B21/00; H01L21/304; (IPC1-7): F26B15/14; F26B21/00; H01L21/304
Domestic Patent References:
| JP4209515A | ||||
| JP59184094U |
Attorney, Agent or Firm:
Tatsuhiko Sato (1 outside)