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Title:
NEEDLE SINGLE CRYSTAL COMPOSITE
Document Type and Number:
Japanese Patent JPH0733596
Kind Code:
A
Abstract:

PURPOSE: To increase the buckling load and stiffness of a needle single crystal by coating a side face of the needle single crystal formed by the VLS growth method with an electro-conductive layer and embedding it in an embedding material.

CONSTITUTION: A needle single crystal (A) of an element or a compound such as Si, LaB6 formed on an insulating base 1 such as Si single crystal by the VLS process (3 is a needle single crystal; 5 is alloy on the top end) is coated with a metal of high electroconductivity of 1 to 10μm thickness on its side face and, when needed, its top flat part by metallizing, plating or dipping to give an electroconductive single crystal (B) of 5 to 300μm diameter and 1 to 500 aspect ratio. The single crystal (B) is embedded with a thermosetting containing an inorganic filler or a thermoplastic resin or a glass softening at a low temperature in a thickness of 1-2mm, 300 to 500°C so that the positioning accuracy of the single crystal (B) is kept in the range of 0 to 10μm and the needle crystals project from the surface of the embedding material 7 by 10 to 500μm to give the objective needle single crystal composite (E).


Inventors:
AMAMIYA MASARU
KATO KAZUO
Application Number:
JP18504893A
Publication Date:
February 03, 1995
Filing Date:
July 27, 1993
Export Citation:
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Assignee:
DENKI KAGAKU KOGYO KK
International Classes:
C30B11/12; C30B29/62; G01Q60/16; G01Q60/38; G01Q70/10; G01Q70/16; G01R1/067; H01B1/00; H01B5/16; H01L21/66; H01L29/06; (IPC1-7): C30B29/62; C30B11/12; G01R1/067; H01B1/00; H01B5/16; H01L21/66