Title:
【発明の名称】真空設備から廃ガスを連続的に精製する装置
Document Type and Number:
Japanese Patent JP3043805
Kind Code:
B2
Abstract:
PCT No. PCT/EP90/02081 Sec. 371 Date Aug. 6, 1991 Sec. 102(e) Date Aug. 6, 1991 PCT Filed Dec. 3, 1990 PCT Pub. No. WO91/08825 PCT Pub. Date Jun. 27, 1991.A device for continuously purifying the waste gases from a vacuum unit using a gas permeation membrane. Reduced equipment and operating costs are achieved with good separation performance, by using a single pump to both remove the waste gas stream from the vacuum unit and to create a pressure difference across the gas permeation membrane. The vacuum pump is disposed downstream from the vacuum unit and upstream from the gas permeation meambrane. In addition to being connected to the vacuum unit, the suction side of the vacuum pump is also connected to the permeate side of the gas permeation membrane.
Inventors:
Hauk, Gerhard
Application Number:
JP50181690A
Publication Date:
May 22, 2000
Filing Date:
December 03, 1990
Export Citation:
Assignee:
Jihi Gezelshaft Mitt Beschlenktel Haftung und Company Commandet Gezelshaft
International Classes:
B01D53/22; F04B37/08; (IPC1-7): B01D53/22; F04B37/08
Attorney, Agent or Firm:
Aoyama Ryo (2 outside people)