Title:
【発明の名称】電子ビームを成形する装置及び該装置の製造法並びに使用
Document Type and Number:
Japanese Patent JP2002517881
Kind Code:
A
Abstract:
The invention is directed to an extremely low-capacitance device for shaping an electron beam. The device is based on a ceramic body having a monolithic multi-layer structure. The manufacture of the ceramic body ensues with the assistance of LTCC technology, whereby this method is designationally modified. The body is constructed of pre-sintered ceramic layers whose lateral shrinkage is suppressed. The through apertures of the electrodes for the electron beam are thus arranged exactly coaxially, and the tolerances of the electrode dimensions are decoupled from the shrinkage during sintering. The electron beam of an electron gun is focused and the intensity thereof is modulated with the assistance of such a device.
Inventors:
Claus Burghart
Wolfgang Eckhart
Zilvia Goulke
Root menner
Wolfram Verding
Wolfgang Eckhart
Zilvia Goulke
Root menner
Wolfram Verding
Application Number:
JP2000552697A
Publication Date:
June 18, 2002
Filing Date:
June 01, 1999
Export Citation:
Assignee:
Siemens Aktiengesellschaft
International Classes:
H01J1/00; H01J9/18; H01J37/12; H01J3/02; (IPC1-7): H01J3/02; H01J9/18
Attorney, Agent or Firm:
Toshio Yano (4 outside)