Title:
【発明の名称】気体の固有光学特性を測定する装置および方法
Document Type and Number:
Japanese Patent JP3332366
Kind Code:
B2
Inventors:
Hill, henry allen
Application Number:
JP2000532683A
Publication Date:
October 07, 2002
Filing Date:
January 16, 1999
Export Citation:
Assignee:
Zygo Corporation
International Classes:
G01B9/02; G01J9/02; G01N21/45; (IPC1-7): G01N21/45; G01B9/02
Domestic Patent References:
| JP1090175A | ||||
| JP9318310A | ||||
| JP7225114A | ||||
| JP62233704A |
Other References:
【文献】米国特許4685803(US,A)
【文献】米国特許44733967(US,A)
【文献】米国特許44813783(US,A)
【文献】米国特許44733967(US,A)
【文献】米国特許44813783(US,A)
Attorney, Agent or Firm:
Shusaku Yamamoto