Title:
【発明の名称】荷電粒子ビームの形状制御を可能とする装置
Document Type and Number:
Japanese Patent JP3359677
Kind Code:
B2
Abstract:
System to control the form of a charged particle beam. The particle beam emanates from a source (58) of these particles. This source is associated with a collecting electrode which collects the particles. The system comprises at least one resistive zone (56) and at least two control electrodes (52, 54), this resistive zone and these control electrodes being arranged substantially at the same level as the source, these control electrodes being furthermore placed on either side of the resistive zone and intended for polarising the latter, the electrical resistance profile of the resistive zone being chosen so as to have the distribution of potential making it possible to obtain the desired form of the beam emanating from the source when the control electrodes are suitably polarised. Application to the focusing of a charged particle beam.
Inventors:
Cherry lulu
Christoph Py
Christoph Py
Application Number:
JP11093A
Publication Date:
December 24, 2002
Filing Date:
January 04, 1993
Export Citation:
Assignee:
Komitsaria Talenergy Atomique
International Classes:
H01J1/304; H01J3/02; H01J3/18; H01J3/30; (IPC1-7): H01J3/18; H01J3/30
Domestic Patent References:
| JP62290052A | ||||
| JP63274043A | ||||
| JP1146236A | ||||
| JP2112125A |
Attorney, Agent or Firm:
Akira Asamura (2 outside)