Title:
【発明の名称】ダイヤモンド表面音波デバイスとその製造方法
Document Type and Number:
Japanese Patent JPH10507599
Kind Code:
A
Abstract:
A high frequency Surface Acoustic Wave (SAW) device includes a highly oriented diamond layer adjacent a piezoelectric layer. In one embodiment, laterally spaced apart piezoelectric layers or portions confine propagation of the wave within the diamond layer. Interdigitated electrodes may be provided by electrically conductive metal lines and/or by heavily doped surface portions of the diamond layer. Undesirable reflections may be reduced by providing the piezoelectric layer with opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation. The surface acoustic wave device may be used as a filter, amplifier, convolver, and phase shifter. Methods for making the surface acoustic wave device are also disclosed.
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Inventors:
Dreyfus, David El
Michelle El, Hartsel
Michelle El, Hartsel
Application Number:
JP51326796A
Publication Date:
July 21, 1998
Filing Date:
October 02, 1995
Export Citation:
Assignee:
Kobe Steel US, Inc.
International Classes:
G01N29/00; H01L41/09; H03H3/02; H03H3/08; H03H9/02; H03H9/17; H03H9/25; H03H9/42; H03H9/72; (IPC1-7): H03H9/25; G01N29/18; H01L41/09; H03H3/02; H03H3/08; H03H9/17; H03H9/25; H03H9/42; H03H9/72
Attorney, Agent or Firm:
Nao Okuyama (3 others)