Title:
【発明の名称】発光によるデバイスおよびその材料の評価装置
Document Type and Number:
Japanese Patent JP2983022
Kind Code:
B2
Abstract:
PURPOSE:To quantitatively evaluate the reliability of a semiconductor element and the material thereof by catching gathered light as a photon by an imaging means and taking the image of the two-dimensional pattern of weak light by counting the photon. CONSTITUTION:A device 10 to be measured is placed on a movable inspection stand at an inspection position and an optical microscope 12 gathering weak light is provided so as to face to the device 10. An imaging means 13 for converting a light signal to an electric signal to output the same is provided to the image forming surface of the microscope 12. The imaging means 13 catches light as a photon being the min. unit to detect the same one at a time two-dimensionally. An image processor 15 for operating an image signal through an A/D converter 14 is connected to the means 13 on the output side thereof while an accumulation means 16 for accumulating a data signal, a display device 17 for reconstituting an operation result to output the same and a comparing operation means 19 for outputting a control signal are connected to the apparatus 15. The data of the apparatus 15 is sent to the means 19 along with the external data from an input part 20 and both data are subjected to comparing operation to output a determined control signal or analytical result.
Inventors:
MIZUSHIMA YOSHIHIKO
INUZUKA EIJI
INUZUKA EIJI
Application Number:
JP18093888A
Publication Date:
November 29, 1999
Filing Date:
July 20, 1988
Export Citation:
Assignee:
HAMAMATSU HOTONIKUSU KK
International Classes:
G01N21/64; G01N21/66; G01R31/302; H01L21/66; G01R31/26; (IPC1-7): G01R31/26; G01N21/64; G01N21/66; H01L21/66
Domestic Patent References:
| JP6370536A | ||||
| JP5796241A | ||||
| JP5339179A | ||||
| JP61273088A | ||||
| JP6488381A | ||||
| JP63119541A |
Other References:
【文献】米国特許4680635(US,A)
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)