【発明の名称】熱的絶縁性及び導電性を有する相互接続構造及びその生成方法

Title:

【発明の名称】熱的絶縁性及び導電性を有する相互接続構造及びその生成方法

Document Type and Number:

Japanese Patent JP2565524

Kind Code:

B2

Abstract:

A pyroelectric focal plane array useful for thermal imaging applications comprises a detector (10), comprises a reticulated and aluminized pyroelectric chip (12) interfaced with a signal processor chip (14) by thermally insulating bumps (30) coated with a thin conductive layer (38) to form a plurality of thermally insulative and electronically conductive interconnections (16) between detector chips (12) and processor chip (14).

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Inventors:

SHAHAMU IFUARU JEI
PINESU MIKAERU WAI
KODA ENU JON
MAFUI DANIERU EFU

Application Number:

JP50333887A

Publication Date:

December 18, 1996

Filing Date:

May 12, 1987

Export Citation:

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Assignee:

HUGHES AIRCRAFT CO

International Classes:

H01L23/52; G01J5/34; H01L21/3205; H01L21/60; H01L25/16; H01L27/16; H01L37/00; H01L37/02; (IPC1-7): H01L21/3205; H01L21/321

Other References:

【文献】米国特許4740700(US,A)

Attorney, Agent or Firm:

Takehiko Suzue (2 outside)

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