Title:
【発明の名称】イオン注入機に使用するイオン発生装置とその方法
Document Type and Number:
Japanese Patent JP2995388
Kind Code:
B2
Abstract:
The ion source comprises a confinement chamber with conductive chamber walls which bound a confinement chamber interior defines an ion exit aperture. The confinement chamber includes an access opening in one of the conductive chamber walls at a position spaced from the exit aperture and a base supports the confinement chamber in a position relative to structure for forming an ion beam. A cathode (124) is supported by the base and positioned to emit ionising electrons into the chamber interior for ionising the material in the interior of the confinement chamber. The cathode comprises a tubular conductive part extending through the access opening into the confinement chamber and supports a conductive cap (164) at one end which faces into the interior of the confinement chamber and includes an open end axially opposite the conductive cap. A filament (178) is supported by the base at a position inside the tubular conductive part for heating the cap to cause the ionising electrons to be emitted from the conductive cap into the confinement chamber. A mounting arm is spaced from the base by an insulator and supports the cathode within the access opening in a spaced relation to the conductive chamber wall. Another mounting structure is electrically isolated from the mounting arm and extends into the open end of the tubular conductive part to support the filament in spaced relation to the conductive cap of the cathode.
Inventors:
Clown spherazzo
Edward Kilby McIntyre, Jr.
William Edward Reynolds
Richard Maurice Crowtier
Thomas Nail Horse Key
Edward Kilby McIntyre, Jr.
William Edward Reynolds
Richard Maurice Crowtier
Thomas Nail Horse Key
Application Number:
JP31952695A
Publication Date:
December 27, 1999
Filing Date:
November 14, 1995
Export Citation:
Assignee:
EATON CORPORATION
International Classes:
H01J27/20; H01J27/14; H01J37/08; H01J37/317; H01L21/265; (IPC1-7): H01J37/317; H01J27/20; H01J37/08
Domestic Patent References:
| JP3233835A | ||||
| JP4236774A | ||||
| JP4102154U |
Attorney, Agent or Firm:
Nobuo Kaida (2 outside)