Title:
【発明の名称】液体熱交換媒体供給ラインおよび排出ラインの無線周波数アイソレートを行うための方法および装置
Document Type and Number:
Japanese Patent JP2002541336
Kind Code:
A
Abstract:
A passive first-order band reject, or notch, filter characteristic is introduced into a supply and/or return line (18, 20) of a heat transfer system (12) that uses electrically conductive liquid heat transfer medium in contact with radio frequency electrified components (14) typical in sputtering or etching manufacturing equipment. The heat transfer medium line (20) is coiled to create an inherent inductance (L2). A capacitive element (C2) is operatively connected across the coil (29) in the heat transfer medium line (20), the amount of capacitance chosen so that the resonant frequency is at the RF frequency of the components (14) being thermally conditioned. Thus, a high impedance is created for that frequency. The coil (29) and capacitor (C2) combination is protected from physical and electromagnetic interference by an enclosure (44).
Inventors:
Sill, Edward, El
Application Number:
JP2000611305A
Publication Date:
December 03, 2002
Filing Date:
March 27, 2000
Export Citation:
Assignee:
東京エレクトロン株式会社
トーキョー エレクトロン アリゾナ インコーポレイテッド
トーキョー エレクトロン アリゾナ インコーポレイテッド
International Classes:
C23C14/34; F25D17/02; H01J37/32; H01L21/302; H01L21/3065; H05H1/46; H01L21/683; (IPC1-7): C23C14/34; F25D17/02; H01L21/3065; H05H1/46
Attorney, Agent or Firm:
Akira Asamura (3 outside)