Title:
【発明の名称】ターゲット上への材料の蒸着とモニタリングとを同時に行なう方法及び装置
Document Type and Number:
Japanese Patent JP2003504803
Kind Code:
A
Abstract:
A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.
Inventors:
Michael mork
Application Number:
JP2001508472A
Publication Date:
February 04, 2003
Filing Date:
June 30, 2000
Export Citation:
Assignee:
Michael mork
International Classes:
C23C14/54; G21K1/093; G21K5/04; H01J3/07; H01J37/04; H01J37/147; H01J37/153; H01J37/21; H01J37/30; H01J37/317; H01L21/027; G21K1/00; (IPC1-7): H01J37/317; C23C14/54; G21K1/00; G21K1/093; G21K5/04; H01J3/07; H01J37/04; H01J37/147; H01J37/153; H01J37/21; H01L21/027
Attorney, Agent or Firm:
Sugimura Kosaku (1 person outside)
Previous Patent: 電界電子放出材料を製造する方法および前記材料から成る電界電子エミッ...
Next Patent: 金属粒子及び／又は合金粒子と液体電解溶媒との混合物、及びそれらの製...
Next Patent: 金属粒子及び／又は合金粒子と液体電解溶媒との混合物、及びそれらの製...