Title:
【発明の名称】スライス装置の切削抵抗検出方法
Document Type and Number:
Japanese Patent JP2873312
Kind Code:
B2
Inventors:
NISHIKUBO MASANORI
Application Number:
JP5029690A
Publication Date:
March 24, 1999
Filing Date:
February 28, 1990
Export Citation:
Assignee:
SUMITOMO KINZOKU KOGYO KK
International Classes:
B24B27/06; B23D59/00; B28D1/22; B28D5/00; B28D5/02; H01L21/304; (IPC1-7): H01L21/304; B24B27/06; B28D1/22
Domestic Patent References:
| JP6430714A | ||||
| JP3241833A |
Attorney, Agent or Firm:
Yoshihisa Oshida