Title:
【発明の名称】外部汚染から囲繞体を隔離する方法
Document Type and Number:
Japanese Patent JPH0821529
Kind Code:
B2
Abstract:
The present invention relates to a method for isolation from exterior pollution of a space comprising - or on which there can be adapted - a tube (2), one end of which opens into said space and the other end of which is open (5), characterised in that:
- there is formed on the internal wall of said tube and in the vicinity of the opening (5) at least one slot (6) which is arranged in a plane perpendicular to the axis of said tube and inclined towards said opening, and said slot is supplied with the aid of a gas so as to inject, into said tube, a continuous sheet of said gas,
- there is arranged on the internal wall of said tube, situated between said slot (6) and said opening (5), at least one porous plate and said plate is supplied with the aid of a gas which forms a weak gaseous current which is capable of eliminating the low pressure formed by the gaseous sheet emerging from said slot (6),
- and said space is kept at slight excess pressure so as to create a gaseous current which runs through said tube (2) and diverts towards the opening (5) the sheet(s) of gas emerging from said slot (6).
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Inventors:
Francois Méline
Application Number:
JP26167988A
Publication Date:
March 04, 1996
Filing Date:
October 19, 1988
Export Citation:
Assignee:
Société Générale Pool Rec Technik Nouvelle-S.J.N
International Classes:
B01L1/00; B25H1/20; F24F9/00; H01L21/00; H01L21/02; H01L21/677; (IPC1-7): H01L21/02; B01L1/00; B25H1/20; F24F9/00
Attorney, Agent or Firm:
Hideo Takino
Next Patent: レジスト剥離方法