Title:
【発明の名称】熱量計関係の検出器を製造する方法と、この方法によって製造される検出器
Document Type and Number:
Japanese Patent JP2002533715
Kind Code:
A
Abstract:
The present invention relates to a method of producing a calorimeter-related detector. A measuring cell (2) includes a cavity (21), which functions to enclose a volume (G) of medium intended for measuring or evaluating purposes. The surface or parts of the surface that forms walls within the measuring cell or the cavity is/are coated with one or more different metal layers (M1, M2). The detector (3) is comprised of a thermal element and is formed on a base structure (31). That part of the base structure that shall form said detector is comprised of one or more topographically structured surface regions. At least said surface region or surface regions is/are coated with a first and a second electrically conductive metal layer (M1 and M2 respectively) which are intended to form said thermocouple. The first metal layer (M1) is applied at a first angle other than 90 DEG , and the second metal layer (M2) is applied at a second angle which is also other than 90 DEG and which differs from the first angle. The topographical structure and/or configuration including the thus coated electrically conductive layers provides the function of one or more thermocouples, by virtue of the first and the second metal layers (M1, M2) overlapping each other within discrete detector-associated surface parts.
Inventors:
Ahman, Par, Ove
Application Number:
JP2000591413A
Publication Date:
October 08, 2002
Filing Date:
December 29, 1999
Export Citation:
Assignee:
Ohmic Arb
International Classes:
G01K17/00; G01N25/32; H01L35/32; (IPC1-7): G01N25/32; G01K17/00
Attorney, Agent or Firm:
Yoshihiro Morimoto