Title:
【発明の名称】窒化ガリウム系化合物半導体発光素子の作製方法
Document Type and Number:
Japanese Patent JP2916613
Kind Code:
B2
Inventors:
AKASAKI ISAMU
AMANO HIROSHI
KITO MASAHIRO
AMANO HIROSHI
KITO MASAHIRO
Application Number:
JP13616696A
Publication Date:
July 05, 1999
Filing Date:
May 30, 1996
Export Citation:
Assignee:
NAGOYA DAIGAKU GAKUCHO
International Classes:
C30B29/38; H01L21/205; H01L33/32; (IPC1-7): H01L33/00; C30B29/38; H01L21/205
Other References:
Ｊｏｕｒｎａｌ ｏｆ Ｅｌｅｃｔｒｏｃｈｅｉｃａｌ Ｓｏｃｉｅｔｙ Ｖｏｌ．１２１，Ｎｏ．９，ｐｐ．１２０２−１２０７（１９７５）
Ｊｏｕｒｎａｌ ｏｆ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ Ｖｏｌ．１４，Ｎｏ．５，ｐｐ．６３６−６４４
Ｊｏｕｒｎａｌ ｏｆ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ Ｖｏｌ．１４，Ｎｏ．５，ｐｐ．６３６−６４４
Attorney, Agent or Firm:
Akihide Sugimura (9 outside)