Title:
【発明の名称】自動位置合わせされた焦点合わせグリッドを有する微小点電子源の製造方法
Document Type and Number:
Japanese Patent JP2002517065
Kind Code:
A
Abstract:
A process for manufacturing a micropoint electron source with an extraction grid and a focusing grid. This process allows for precise alignment of the holes of the extraction grid with the apertures of the focusing grid by using a single photolithography step for making the holes in the extraction grid. Such a process may find particular application for making a micropoint electron source for a flat viewing screen.
Inventors:
Ame Perrin
Bridget Montmayeur
Cash register blanc
Bridget Montmayeur
Cash register blanc
Application Number:
JP2000551412A
Publication Date:
June 11, 2002
Filing Date:
May 25, 1999
Export Citation:
Assignee:
Komitsaria Talenergy Atomique
International Classes:
H01J3/02; H01J9/02; (IPC1-7): H01J9/02
Attorney, Agent or Firm:
Masatake Shiga (7 outside)