Title:
【発明の名称】有機焦電圧電体の製造方法およびその製造装置
Document Type and Number:
Japanese Patent JP3339005
Kind Code:
B2
Abstract:
PURPOSE:To perform polling treatment in a short time so as to elevate productivity by performing the polling treatment to a polyurea film while passing a substrate, where a polyurea film is grown, through an area where an electric field works. CONSTITUTION:A laminate 35 is stacked on a substrate 11, interposing a polyurea film 20 between counter electrodes being a lower electrode 9 and an upper electrode, respectively. Next, the laminate 35 is shifted to the substrate holder 25 inside a polling chamber 3, and then the inside of the polling chamber is maintained in nitride gas atmosphere, and also the laminate 35 is shifted inside the polling chamber at a speed of 1cm/min. from the holder while applying an electric field between a mesh electrode and a wire. Then, the application of the electric field and the heating are stopped, and also the temperature of the polyurea film 20 is annealed to room temperature so as to apply polling treatment to a polling film 20 and manufacture an organic pyroelectric piezoelectric substance L.
Inventors:
Masayuki Iijima
Application Number:
JP2403492A
Publication Date:
October 28, 2002
Filing Date:
February 10, 1992
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
H01L37/02; H01L41/45; (IPC1-7): H01L37/02; H01L41/26
Domestic Patent References:
| JP348470A | ||||
| JP2284485A | ||||
| JP6320883A | ||||
| JP63144587A |
Attorney, Agent or Firm:
Kinichi Kitamura (2 others)