Title:
【発明の名称】熱型光検出器およびその支持台の製造方法
Document Type and Number:
Japanese Patent JP2560560
Kind Code:
B2
Abstract:
A thermal photodetector comprises a thermal photodetector element 1 and a support stand 2. The support stand is made of a material of which heat conduction is relatively small, and is thermally connected to and mounted on a mount 3 which is temperature controlled. The size of the support stand is determined such that the quantity of heat conduction in a heat conduction passage from the thermal photodetector element to the mount is equal to a predetermined quantity. Thus, the photodetector is maintained within a predetermined temperature range. A method of manufacturing a thermal photodetector, comprises the steps of (a) exposing to light, a photosensitive glass plate having a thickness corresponding to the height of the support stand of a thermal photodetector to be manufactured, the light exposure being made with a mask having a light shield portion, the shape of which corresponds to the shape in transverse section of the support stand; (b) sticking the photosensitive glass plate to a pyroelectric crystal plate provided on one surface thereof with an electrode for taking out a signal, that surface facing the photosensitive glass plate; and (c) removing, by etching, the light-sensed portion of the photosensitive glass plate which has been formed by the light exposure.
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Inventors:
KITA JUNICHI
KISHIHARA HIROYUKI
KISHIHARA HIROYUKI
Application Number:
JP9041691A
Publication Date:
December 04, 1996
Filing Date:
April 22, 1991
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01J1/02; G01J5/02; G01J5/34; H01L37/02; G01J5/06; (IPC1-7): G01J1/02; G01J5/02; H01L37/00
Attorney, Agent or Firm:
Nishida Arata