Title:
【発明の名称】クロー形真空ポンプの運転法及びこの運転法の実施に適したクロー形真空ポンプ
Document Type and Number:
Japanese Patent JPH09502001
Kind Code:
A
Abstract:
A method of operating a claw-type vacuum pump with two or more stages, each of which has a suction chamber with a pair of claw rotors and end-located suction and discharge ports. To avoid the possibility of liquids affecting operation of the pump, the invention proposes that the pump is operated without internal compression and that the gases emerging from at least one stage are cooled.
Inventors:
Coves, andreas
Gottschrich, Uwe
Brenner, Rothal
Clean, hartmut
Gottschrich, Uwe
Brenner, Rothal
Clean, hartmut
Application Number:
JP50861994A
Publication Date:
February 25, 1997
Filing Date:
August 31, 1993
Export Citation:
Assignee:
Riebold Actien Gezershaft
International Classes:
F04C25/02; F04C18/12; F04C23/00; F04C29/04; (IPC1-7): F04C25/02
Attorney, Agent or Firm:
Toshio Yano (3 outside)