PURPOSE: To provide a conveyor with a frame fixing mechanism for fixing a lead frame together with a visual inspection system with this mechanism, which realizes easy and highly accurate inspection in a productive step for a semiconductor integrated circuit device.
CONSTITUTION: A conveyor with a frame fixing mechanism is used for inspecting an outer view of a semiconductor chip. mounted on a lead frame 1. The conveyor with a frame fixing mechanism comprises a conveyor (belt) 2, a digital closing-and-opening frame-fixing mechanism mounted on both sides of the conveyor (belt) 2, and a stage mechanism 4 that can move vertically with regard to the frame fixing mechanism 3. When a lead frame 1 is fixed to be inspected, the lead frame 1 is pushed by an up-and-down stroke of the stage mechanism 4, and then the lead frame 1 is supported between a frame fixing plate spring 7 in the frame fixing mechanism 3 and an inspection chute 10 in the stage mechanism 4.
OTA KOICHI
HITACHI TOKYO ELECTRONICS