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Title:
CONVEYOR WITH FRAME FIXING MECHANISM AND VISUAL INSPECTION SYSTEM
Document Type and Number:
Japanese Patent JPH0669253
Kind Code:
A
Abstract:

PURPOSE: To provide a conveyor with a frame fixing mechanism for fixing a lead frame together with a visual inspection system with this mechanism, which realizes easy and highly accurate inspection in a productive step for a semiconductor integrated circuit device.

CONSTITUTION: A conveyor with a frame fixing mechanism is used for inspecting an outer view of a semiconductor chip. mounted on a lead frame 1. The conveyor with a frame fixing mechanism comprises a conveyor (belt) 2, a digital closing-and-opening frame-fixing mechanism mounted on both sides of the conveyor (belt) 2, and a stage mechanism 4 that can move vertically with regard to the frame fixing mechanism 3. When a lead frame 1 is fixed to be inspected, the lead frame 1 is pushed by an up-and-down stroke of the stage mechanism 4, and then the lead frame 1 is supported between a frame fixing plate spring 7 in the frame fixing mechanism 3 and an inspection chute 10 in the stage mechanism 4.


Inventors:
NISHIO HIDEJI
OTA KOICHI
Application Number:
JP21532792A
Publication Date:
March 11, 1994
Filing Date:
August 13, 1992
Export Citation:
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Assignee:
HITACHI LTD
HITACHI TOKYO ELECTRONICS
International Classes:
H01L21/50; (IPC1-7): H01L21/50
Attorney, Agent or Firm:
Yamato Tsutsui