Title:
【発明の名称】銅、アルミニウムまたはその合金からなる薄板の成膜前処理方法
Document Type and Number:
Japanese Patent JP2911102
Kind Code:
B2
Inventors:
KISODA KINYA
SHINTANI MASANORI
SHINTANI MASANORI
Application Number:
JP3989095A
Publication Date:
June 23, 1999
Filing Date:
February 28, 1995
Export Citation:
Assignee:
CHUGAI RO KOGYO KK
International Classes:
C23C14/02; C23C14/56; C23F4/00; (IPC1-7): C23C14/02; C23C14/56; C23F4/00
Domestic Patent References:
| JP2247371A |
Attorney, Agent or Firm:
Aoyama Ryo (2 outside people)