Title:
【発明の名称】窒化アルミニウム被膜の製造方法
Document Type and Number:
Japanese Patent JP2678771
Kind Code:
B2
Inventors:
Fumio Kodaka
Kurachi Ikuo
Hiroaki Wada
Yoshiki Fukuyama
Yoko Watanabe
Kurachi Ikuo
Hiroaki Wada
Yoshiki Fukuyama
Yoko Watanabe
Application Number:
JP21788488A
Publication Date:
November 17, 1997
Filing Date:
August 31, 1988
Export Citation:
Assignee:
Bridgestone Corporation
International Classes:
C23C26/00; C01B21/072; C23C8/24; C23C24/08; (IPC1-7): C23C24/08; C01B21/072; C23C8/24
Domestic Patent References:
| JP1252786A | ||||
| JP251407A | ||||
| JP5538907A |
Attorney, Agent or Firm:
Kume Eiichi