Title:
【発明の名称】プローブカードのプローブ機構から堆積ハンダを取り除くための方法
Document Type and Number:
Japanese Patent JP2002501177
Kind Code:
A
Abstract:
A method for removing deposits from a probing feature of a probe card. The method includes the step of exposing the probing feature of a probe card to a composition that chemically reacts with the deposits on the probing feature to remove the deposits from the probing feature while not substantially effecting the material comprising the probing feature.
Inventors:
Shell, Melissa Kay
Yoshimoto, Richard Es
Yoshimoto, Richard Es
Application Number:
JP2000527836A
Publication Date:
January 15, 2002
Filing Date:
December 21, 1998
Export Citation:
Assignee:
INTEL CORPORATION
International Classes:
G01R1/06; C23G1/02; G01R3/00; G01R31/28; H01L21/66; G01R1/067; G01R1/073; (IPC1-7): G01R31/28; C23G1/02; G01R1/06; H01L21/66
Domestic Patent References:
| JPH10501928A | 1998-02-17 | |||
| JPH03257185A | 1991-11-15 | |||
| JPH07128367A | 1995-05-19 | |||
| JPH0244746A | 1990-02-14 | |||
| JPH07234262A | 1995-09-05 | |||
| JPH11230989A | 1999-08-27 |
Attorney, Agent or Firm:
Masaki Yamakawa