Title:
【発明の名称】水を使用して物品を洗浄し更に乾燥する方法
Document Type and Number:
Japanese Patent JP2834795
Kind Code:
B2
Inventors:
TANAKA MASATO
Application Number:
JP27163989A
Publication Date:
December 14, 1998
Filing Date:
October 20, 1989
Export Citation:
Assignee:
CHODA SEISAKUSHO KK
International Classes:
B08B3/04; B08B3/10; F26B5/04; F26B21/00; H01L21/304; (IPC1-7): B08B3/10; F26B5/04; F26B21/00; H01L21/304
Domestic Patent References:
| JP6347933A | ||||
| JP56130577A | ||||
| JP57120078A | ||||
| JP58397A | ||||
| JP62173720A | ||||
| JP61138582A |
Attorney, Agent or Firm:
Kinzo Oyama (1 person outside)