Title:
【発明の名称】位置検出装置及びその検定方法と調整方法
Document Type and Number:
Japanese Patent JP3327781
Kind Code:
B2
Abstract:
A position detecting method includes illuminating a mark having a step, by use of an illuminating system, detecting an image of the mark, by use of a position detecting optical system, calculating an evaluation value representing symmetry of the detected mark image, and adjusting a position of an effective light source of the illuminating system with respect to an optical axis of the position detecting optical system, on the basis of the evaluation value.
Inventors:
Kazuhiko Mishima
Application Number:
JP20785696A
Publication Date:
September 24, 2002
Filing Date:
July 17, 1996
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/00; G03F9/00; H01L21/027; (IPC1-7): H01L21/027; G01B11/00; G03F9/00
Domestic Patent References:
| JP5209722A | ||||
| JP6181155A | ||||
| JP864500A | ||||
| JP669097A |
Attorney, Agent or Firm:
Yukio Takanashi