Title:
【発明の名称】圧力センサおよびその圧力センサを用いた気体流量計
Document Type and Number:
Japanese Patent JPH07111388
Kind Code:
B2
Abstract:
PURPOSE:To enable flow to be detected highly accurately by forming two piezoelectric element-holding surfaces in a pair which hold a piezoelectric element on a slant surface. CONSTITUTION:A piezoelectric element 102 is formed as merely a circular flat film before assembly. Also, with two holders 108 and 109 in a pair, piezoelec tric element holding surfaces 108a and 109a are formed in a same direction on a slanted surface at a same angle. Therefore, when the element 102 is held by the holders 108 and 109, a circular edge part of the element 102 is forced to be deformed along the slanted surfaces 108a and 109a and the entire element 102 is extended in diaphragm state, thus enabling the element 102 to be produced easily and flow to be detected highly accurately with high sensitivity.
Inventors:
Shuzo Takeda
Kato
Nobuo Hashimoto
Kato
Nobuo Hashimoto
Application Number:
JP27098890A
Publication Date:
November 29, 1995
Filing Date:
October 09, 1990
Export Citation:
Assignee:
TORAY INDUSTRIES,INC.
International Classes:
G01F1/20; G01L9/08; G01L13/06; G01F1/32; (IPC1-7): G01L9/08; G01F1/20; G01F1/32; G01L13/06
Domestic Patent References:
| JP61190160U | ||||
| JP5867404U |
Attorney, Agent or Firm:
Ban Toshimitsu